• INFINITY VB


INFINITY VB

The Infinity VB is a vertical sputtering platform for single or dual side deposition on substrates or multi-substrate fixtures up to 650x650mm. It is available with active substrate cooling, a high aspect ratio sputtering process combining HiPIMS and biasing for through hole metallisation and an automatic multi-substrate loading magazine for increased throughput. The system is a modular system comprised of a minimum of one process chamber and a load lock. The substrates are mounted in a moving vertical fixture and optionally sputtered from both sides by linear magnetrons. Short pump downtimes, high uniformity coatings, limited pinhole defects, high volume manufacturing, just to mention a few benefits. Furthermore, it is upgradable to an inline system with several process modules.


SPUTTERING PROCESS

  • High throughput
  • Modular design
  • Reactive sputtering
  • DC/RF/Bipolar/HiPIMS/MF
  • Up to 6 linear magnetrons
  • Dual side sputtering

Typical application areas

  • Sheet coating (standard up to 650 x 650mm)
  • Sheet coating (extended up to 650 x 3000mm)
  • Sheet coating (custom size)
  • Metalisation in mechatronics
  • MEMS and Piezo sensor fabrication
  • AR and high reflective mirror coatings
  • Battery, Fuel cell, Hydrogen and TEG production
  • Solar absorbers

Interested in the Infinity VB?
Contact us for a technical and dedicated discussion regarding your needs!

Webbureau ITTP