The Infinity VB is a vertical sputtering platform for single or dual side deposition on substrates or multi-substrate fixtures up to 650x3000mm. For substrates up to 650×650 it is available with active substrate cooling, a high aspect ratio sputtering process combining HiPIMS and biasing for through hole metallisation and an automatic multi-substrate loading magazine for increased throughput. The system is a modular system comprised of a minimum of one process chamber and a load lock. The substrates are mounted in a moving vertical fixture and optionally sputtered from both sides by linear magnetrons. Short pump downtimes, high uniformity coatings, limited pinhole defects, high volume manufacturing, just to mention a few benefits. Furthermore, it is upgradable to an inline system with several process modules.
Typical application areas
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