Polyteknik has delivered variously sized evaporation systems for both high-end industry and university R&D. A combination of highly skilled process, software and mechanical engineers secures you the most optimum evaporation solution, including:
World leading Glancing Angle Deposition system
The Flextura 200 GLAD module is a production proven glancing angle evaporation module for industry scale volumes. You can load .csv files (function) with coordinates for angle and rotation in steps of 0.1s, which almost leaves it to the imagination of the user to decide the complexity of the motion.
The module is compatible with standard top-down processes due to the smart design of the GLAD substrate stage/chuck. ESC with backside gas cooling is a useful option already implemented.
You can run the Flextura module as a batch system, with a single substrate load lock, cassette load lock, or plug it into our Flextura Cluster platform. In other words, you can start from a highly flexible standalone system, and later add additional processes and analytics to bring your thin film research to new heights. Save valuable clean room space and automate your deposition processes without compromising flexibility.
Prefer independent deposition systems, then the Flextura PVD modules in combination with a single substrate load lock are a great versatile high quality tool.