FLEXTURA EVAPORATOR

FLEXTURA EVAPORATOR

FLEXTURA EVAPORATOR

The Flextura Evaporator is an evaporation system that covers a range of evaporation processes and combinations thereof including e-beam, resistive evaporation as well as ion beam assisted deposition (IBAD). Though not well known as a process in connection with a cluster tool, the Flextura evaporation modules can be connected to the Flextura Cluster platform for single substrate processing of advanced processes like high temperature epitaxial growth (still mainly R&D), or production of GLAD films – directly from cassette.

The Evaporator modules are perfect for very high uniformity depositions in SAW/BAW devices, metallisation processes in semiconductor, LED and MEMS production as well as deposition of metals and dielectrics in optoelectronics. Extended throw option for high volume lift-off processes.

MAIN FEATURES

Evaporation processes

Polyteknik has delivered variously sized evaporation systems for both high-end industry and university R&D. A combination of highly skilled process, software and mechanical engineers secures you the most optimum evaporation solution, including:

E-beam evaporation
Thermal evaporation
Glancing angle deposition (GLAD)
Ion beam assisted deposition (IBAD)

World leading Glancing Angle Deposition system

The Flextura 200 GLAD module is a production proven glancing angle evaporation module for industry scale volumes. You can load .csv files (function) with coordinates for angle and rotation in steps of 0.1s, which almost leaves it to the imagination of the user to decide the complexity of the motion.

The module is compatible with standard top-down processes due to the smart design of the GLAD substrate stage/chuck. ESC with backside gas cooling is a useful option already implemented.

CHOOSE SUBSTRATE LOADING

You can run the Flextura module as a batch system, with a single substrate load lock, cassette load lock, or plug it into our Flextura Cluster platform. In other words, you can start from a highly flexible standalone system, and later add additional processes and analytics to bring your thin film research to new heights. Save valuable clean room space and automate your deposition processes without compromising flexibility.

Prefer independent deposition systems, then the Flextura PVD modules in combination with a single substrate load lock are a great versatile high quality tool.

Batch system

Single substrate loading

Cassette loading

Cluster system

Interested in a Flextura Evaporator module?
Contact us for a technical and dedicated discussion regarding your needs,
or download our brochure on the Flextura PVD Platform to read more!

Brochure

Webbureau ITTP

Cookie Policy

What is a cookie?

A cookie is a small datafile that is saved on your computer, tablet or mobile phone. A cookie is not a program that can contain harmful programs or viruses.

How/why the homepage uses cookies

Cookies are necessary for the homepage to function. Cookies help us get an overview of your visit to the homepage so that we can continually optimise and adjust the homepage to your requirements and interests. For example, cookies remember what you might have added to a shopping cart, if you have previously visited the page, if you are logged in and what languages and currency you want displayed on the homepage. We also use cookies to target our ads to you on other homepages. On a very general level, cookies are used as part of our services in order to show content that is as relevant as possible to you.

How long are cookies saved?

How long cookies are saved on your device can vary. The time when they are scheduled to expire is calculated from the last date you visited the homepage. When cookies expire, they are automatically deleted. You can view a complete list of cookies below.

This is how you can reject or delete your cookies

You can always reject cookies on your computer, tablet or phone by changing your browser settings. Where these settings can be found depends on the type of browser you are using. If you do change the settings, please be aware that there will be some functions and services that you cannot use because they rely on the homepage being able to remember the choices you have made.

You can choose to not receive cookies from Google Analytics here.

Deleting cookies

You can delete cookies that you have previously accepted. If you are using a PC with a recent version of a browser, you can delete your cookies by using these shortcut keys: CTRL + SHIFT + Delete.

If the shortcut keys do not work and/or you are using an Apple computer, you must find out what browser you are using and then click on the relevant link:

Remember: If you are using several different browsers, you must delete the cookies in all of them.