• PVD SYSTEMS FOR ADVANCED THIN FILM RESEARCH AND PRODUCTION

    We deliver reliability, quality, variable capacity, and fair total cost in combination with a high degree of flexibility

PVD SYSTEMS

High throughput and quality thin films

Flextura 300

Flextura 300 Cluster

Flexible production and prepared for the future

Flextura 200

Flextura 200 Cluster

Versatile sputtering modules

Flextura Sputter

Flextura sputter

 Perfect for very high uniformity depositions

Flextura Evaporator

Flextura Evaporator

Advanced thin film research

Flextura R&D

Flextura R&D

An in-line vertical sputtering platform

Infinity VB

Infinity VB

A very high quality entry level deposition system

tornado Compact lab

Tornado compact lab

Tailored to your needs

service

Service and maintenance

Flextura® PVD Platform

– a highly flexible and fully automated platform designed for advanced film processing

The Flextura® PVD platform bridges research and production environments – supporting substrates from smaller R&D wafers to full 300 mm manufac­turing standards, as well as alternative materials.

All process modules can be integrated into the Flextu­ra® Cluster platform or delivered as standalone tools, with single-substrate, cassette, or batch load-lock con­figurations.

Designed for versatility, our systems are installed across both research and production environments, support­ing everything from material exploration to high-vol­ume manufacturing.

Flextura PVD System

Market areas

  • Photonics & PIC
  • Quantum
  • MEMS & sensors
  • Wireless devices
  • Power electronics

Flextura® Platform highlights

  • High temperature deposition (1000°C)
  • Magnetron sputter epitaxy
  • Highly ionised sputtering
  • Gradient sputtering
  • Glancing angle deposition
Flextura PVD

Flexibility and reliability

Combining different technologies from sputtering, evaporation, etch to annealing with opportunities for new dedicated process modules.

The Flextura® platform is configured to handle 100mm, 150mm, 200mm, or 300mm substrates.

Scalable capacity

From R&D to high volume manufacturing; the Flextura® PVD platform is fully upgradable from single module to full cluster with reliable 24/7 production

CMOS compatibility

Flextura® is built for CMOS-compatible processing, delivering the cleanliness and precision demanded by advanced semiconductor fabrication

Smart automation

Fully automated process control with advanced data logging – SECS/GEM, MES integration optional, E84

Download a brochure of our PVD systems or contact us directly for a personal, dedicated and technical discussion around your needs!

Contact us
Download

Polyteknik AS
Moellegade 21
DK-9750 Oestervraa
Denmark
CVR.: 26672031

E: sales@polyteknik.dk
P: +45 9689 2800

PVD Systems

Coating Service

Information

Webbureau ITTP

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