The Flextura 200 Cluster platform is probably the most flexible 200mm cluster tool available. It is truly almost Plug&Play and you may add process modules as your need for capacity or new processes increase.
Proven reliable wafer handling by Brooks MAG LEAP robot, cassette-to-cassette processing – SEMI standard cassette or custom cassette for even more flexibility.
The Flextura way of thinking is giving you the possibility to let the capital investment follow the increasing demands of your facility.
The Magnetron Sputtering modules of the Flextura PVD platform handles sputtering processes from well-known standard metallisation or electrode layers to reactive sputtering of highly c-axis oriented and low stress AlN, TCO’s or even ternary alloys.
The Flextura GLAD module is a production proven glancing angle evaporation module for industry scale volumes with fully automated substrate handling from cassette. Fully compatible with standard top-down processing ensuring fast and direct integration with complementary processes like degas, etch or sputtering.
Proof of concept or contract R&D available for 100 mm!
Substrate degas or pre-clean can be essential for your process or essential for your throughput.
The Evaporation modules covers a range of evaporation processes and combinations of these including e-beam, thermal evaporation, resistive evaporation, as well as ion beam assisted deposition (IBAD).
Though not well known as a process in connection with a cluster tool, the Flextura evaporation modules can be connected to the Flextura Cluster platform for single substrate processing of advanced processes like high temperature epitaxial growth (still mainly R&D), or volume production of GLAD films – directly from cassette.
Is the Flextura Cluster the correct PVD system for you?
Contact us for a technical and dedicated discussion regarding your needs,
or download our brochure on the Flextura Cluster to read more!
Polyteknik AS
Moellegade 21
DK-9750 Oestervraa
Denmark
CVR.: 26672031
E: sales@polyteknik.dk
P: +45 9689 2800
Webbureau ITTP