The Magnetron Sputtering modules of the Flextura PVD platform handles sputtering processes from well-known standard metallisation or electrode layers to reactive sputtering of highly c-axis oriented and low stress AlN, TCO’s or even ternary alloys.
The Flextura GLAD module is a production proven glancing angle evaporation module for industry scale volumes with fully automated substrate handling from cassette. Fully compatible with standard top-down processing ensuring fast and direct integration with complementary processes like degas, etch or sputtering.
Proof of concept or contract R&D available for 100 mm!
Substrate degas or pre-clean can be essential for your process or essential for your throughput.
The Evaporation modules covers a range of evaporation processes and combinations of these including e-beam, thermal evaporation, resistive evaporation, as well as ion beam assisted deposition (IBAD).
Though not well known as a process in connection with a cluster tool, the Flextura evaporation modules can be connected to the Flextura Cluster platform for single substrate processing of advanced processes like high temperature epitaxial growth (still mainly R&D), or volume production of GLAD films – directly from cassette.