• Research and development flextura cluster system with analysis module attached

    FLEXTURA R&D FOR ADVANCED THIN FILM PRODUCTION

    Unique research and development platform

Research and development sputtering and evaporation cluster system Polyteknik AS PVD system cluster thin film

FLEXTURA R&D

The Flextura R&D Cluster is a truly unique research and development platform with a base of the best and most reliable industrial components topped with options for the latest deposition processes in combination with advanced analysis of thin film. It is unveiling a new way of modular thinking for PVD systems. From a single chamber with evaporation or sputtering processes as a standalone system to an efficient research and development cluster tool with multiple advanced processes.

Bottom line – The Flextura R&D Cluster platform delivers advanced thin film research results faster by automated deposition and to some extent automated analysis results for the researcher who will have more time to interpret results, write articles and optimise or find our next wonder material!

MAIN FEATURES

Process Modules

  • High temperature deposition chamber up to 1000 deg C
    • Increased layer quality
    • Epitaxial growth
  • HiPIMS sputtering (highly ionised) chamber
    • High aspect ratio metallisation
    • Layer property tuning
  • Direct magnetron sputtering (DC, RF and pDC)
  • Multi-magnetron chamber (Co-sputtering)
  • Ebeam evaporation
  • RF/ICP etch, degass, cooling, alignment station
  • Single wafer or batch processing directly cassette-to-cassette

Special Applications

  • Process frame for epitaxial growth of thin films at elevated temperatures up to 1000C
  • Glancing Angle deposition by evaporation or sputtering
  • Dynamic in-situ feedback control by PEM or RGA in reactive sputtering
  • HiPIMS sputtering for highly ionised deposition
  • Remote Plasma Sputtering
  • RF/DC bias option
  • Market leading process software technology for accurate real time control of deposition

System highlights

  • Cassette-to-cassette (typical 10 pcs substrates, carriers or masks)
  • Individual recipe for each substrate or a batch recipe
  • Advanced high temperature PVD processing of non-standard semicon solutions
  • Multi magnetron chambers for true co-deposition
  • Automatic loading to single batch fixture
  • Bottom-up or top-down processing

Integrated Analytical Modules

    • In-situ during deposition or etch process
      • RHEED (Reflective High Energy Electron Diffraction ) for monitoring of epitaxial growth
      • PEM (Plasma Emission Monitoring) for dynamic regulation and control of stoichiometry in reactive sputtering processes
    • UHV analytical chamber connected to the cluster (analysis without breaking vacuum)
      • LEED (Low Energy Electron Diffration)
      • UPS (Ultraviolet Photoemission Spectroscopy)
      • XPS (X-ray Photoemission Spectroscopy)
      • Other on request

    Is the Flextura platform the correct PVD system for your research and development needs?
    Contact us for a technical and dedicated discussion regarding your needs,
    or download our brochure on the Flextura PVD Platform to read more!

    Contact us
    Brochure

    Polyteknik AS
    Moellegade 21
    DK-9750 Oestervraa
    Denmark
    CVR.: 26672031

    E: sales@polyteknik.dk
    P: +45 9689 2800

    PVD Systems

    Coating Service

    Information

    Webbureau ITTP

    Cookie Policy

    What is a cookie?

    A cookie is a small datafile that is saved on your computer, tablet or mobile phone. A cookie is not a program that can contain harmful programs or viruses.

    How/why the homepage uses cookies

    Cookies are necessary for the homepage to function. Cookies help us get an overview of your visit to the homepage so that we can continually optimise and adjust the homepage to your requirements and interests. For example, cookies remember what you might have added to a shopping cart, if you have previously visited the page, if you are logged in and what languages and currency you want displayed on the homepage. We also use cookies to target our ads to you on other homepages. On a very general level, cookies are used as part of our services in order to show content that is as relevant as possible to you.

    How long are cookies saved?

    How long cookies are saved on your device can vary. The time when they are scheduled to expire is calculated from the last date you visited the homepage. When cookies expire, they are automatically deleted. You can view a complete list of cookies below.

    This is how you can reject or delete your cookies

    You can always reject cookies on your computer, tablet or phone by changing your browser settings. Where these settings can be found depends on the type of browser you are using. If you do change the settings, please be aware that there will be some functions and services that you cannot use because they rely on the homepage being able to remember the choices you have made.

    You can choose to not receive cookies from Google Analytics here.

    Deleting cookies

    You can delete cookies that you have previously accepted. If you are using a PC with a recent version of a browser, you can delete your cookies by using these shortcut keys: CTRL + SHIFT + Delete.

    If the shortcut keys do not work and/or you are using an Apple computer, you must find out what browser you are using and then click on the relevant link:

    Remember: If you are using several different browsers, you must delete the cookies in all of them.