Glancing Angle Deposition (GLAD)

The simple definition of glancing angle deposition (sometimes referred to as obliged angle deposition) is deposition under an angle during rotation. It is mainly used in evaporation processes, but sometimes also in sputtering processes.

First fully automated glancing angle deposition system was delivered by Polyteknik AS in 2011, the system was developed for R&D on 100mm substrates and is still a workhorse in the clean room facilities of iNano at Aarhus University.