Technology

GENERAL OVERVIEW of Technologies

Sputtering

Evaporation

Glancing Angle Deposition

Dynamic in-situ Process Control

Plasma Emission Monitoring

Rest gas analyser

Quartz crystal monitor

Optical thickness monitor

SEGS/GEM interface

Integration of analytics

-UPS/ARUPS

-LEED

-RHEED (in-situ)

Remote Plasma Sputtering