GENERAL OVERVIEW of Technologies
Sputtering
Evaporation
Glancing Angle Deposition
Dynamic in-situ Process Control
Plasma Emission Monitoring
Residual gas analyser
Quartz crystal monitor
Optical thickness monitor
SEGS/GEM interface
Integration of analytics
-UPS/ARUPS
-LEED
-RHEED (in-situ)
Remote Plasma Sputtering
MADE IN DENMARK