Introducing the Flextura 300 Cluster tool – building on the expertise gained from our Flextura 200 Cluster, this highly reliable PVD platform is an excellent choice for deposition of metals, oxides, and nitrides to produce high quality thin films.
Including degas, pre-clean, and PVD modules and utilising the flexibility of the Flextura platform, the Flextura 300 Cluster allows customer to optimise the configuration to best fit their applications.
Degas, pre-clean and etch
Is the Flextura 300 Cluster the correct PVD system for you?
Contact us for a technical and dedicated discussion regarding your needs,
or download our brochure on the Flextura 300 Cluster to read more!