PVD SYSTEMS – R&D and Science

Please contact us directly for the a personal, dedicated and technical discussion around your needs!

General overview brochure of our PVD systems. Click to download

Tornado Compact LAB – a very high quality entry level deposition system
A compact thin film deposition system available with evaporation or sputtering sources. A versatile entry level deposition system with fully automated process control and data logging with Cryosoft3 HMI. Available with manual load lock for even faster processing.  Read more…

Flextura PVD Module – Sputtering and evaporation for thin film research
The Flextura PVD Module is standalone thin film deposition systems functioning as batch or load lock system. They are compatible with the Flextura R&D cluster platform if future expansion with additional processes should raise.  Read more…

Flextura R&D Cluster – Flexibility and prepared for the future
The Flextura platform is best described as Flexible Production | Flexible Processes | Flexible Investment. It is unveiling a new way of modular thinking for PVD systems. From a single chamber with evaporation or sputtering processes as a standalone system to an efficient cluster tool with multiple advanced processes. Read more…