INFINITY SYSTEMS
The Polyteknik Infinity is a deposition concept with numerous benefits. The system is a modular system comprised of minimum one process chamber and a load lock. The substrates are mounted in a moving vertical fixture and optionallly sputtered from both sides by linear magnetrons. Short pump down times, high uniformity coatings, limited pinhole defects, high volume manufacturing, just to mention a few benefits. Furthermore it is upgradable to an inline system with several process modules.
- Vertical sputtering
- High throughput
- Modular design
- Reactive sputtering
- DC/RF/Bipolar/HiPIMS
- Up to 6 linear magnetrons
- Dual side sputtering
Typical application areas:
- Sheet coating (standard up to 650 x 650mm)
- Sheet coating (extended up to 650 x 3000mm)
- Sheet coating (custom size)
- MEMS and Piezo sensor fabrication
- AR and high reflective mirror coatings
- Battery, Fuel cell and TEG production
- Solar absorbers
MADE IN DENMARK