The Flextura Cluster platform is unveiling a new way of modular thinking of PVD systems – Flexible production and prepared for the future.
Volume Production Applications
- High yield production by PVD: Metallisation, TCOs, AlN, optical reflectors and absorbers.
- Proven reliable wafer handling by Brooks MAG7 robot
- Cassette-to-cassette, wafer slot integrity, Wafer mapping
- Advanced high temperature PVD processing of non-standard semicon solutions
- Multi magnetron chambers for true co-deposition
- Automatic loading to batch fixture
- Bottom-up or top-down processing
- SEGS/GEM Interface option
- Process frame for epitaxial growth of thin films at elevated temperatures up to 1000°C
- Glancing Angle deposition at wafers in mass production scale
- Dynamic in-situ feedback control by PEM or RGA in reactive sputtering
- HiPIMS sputtering for highly ionised deposition
- Electrostic chuck (ESC) with backside gas for substrate cooling or heating, RF/DC bias option.
- Market leading process software technology for accurate real time control of deposition.
General Process Modules:
- HiPIMS sputtering (highly ionised) chamber
- High aspect ratio metallisation
- Layer property tuning
- Direct magnetron sputtering (DC, RF and pDC)
- Multi-magnetron chamber (Co-sputtering)
- Ebeam evaporation
- RF/ICP etch, degass, cooling, alignment station
- Single wafer or batch processing directly from cassette to casette
Specific Process Modules:
- M600 GLAD Module – Glancing angle deposition by ebeam evaporation in a fully automated CMOS compatible tool for processing of up to 200mm wafers from cassette
- M500 EPI Module – Epitaxial growth sputtering module
- Proven low stress & highly c-axis oriented AlN process
- A large parameter room for new materials with substrate temperatures up to 1000°C
- M700 LS Module – Superior sheet resistance uniformities for metal oxides & nitrides
Flexible investment – scalable capacity
The Flextura PVD platform is truly almost Plug&Play and you may add process modules as your need for capacity or new processes increase. The modules function as stand alone units – see Flextura Sputter or Flextura Evaporator – which may be connected to a Flextura PVD Cluster.
The Flextura way of thinking is giving you the possibility to let the capital investment follow increasing demands of your facility.