PVD Systems – Industry and Semicon

Based on customer requirements a wide range of thin film deposition platforms has been developed throughout the years. Here we try to give you an overview of the platforms fitting industrial customers – Reliability, quality, variable capacity and total cost in combination with a high degree of flexibility are the main drivers of these platforms.

Please contact us directly for the a personal, dedicated and technical discussion around your needs!

Download a brochure of our PVD systems HERE

Discovery – A true workhorse for medium volume sputtering
A typical batch system with single or dual side sputtering – perfect for deposition of electrodes on temperature sensitive piezoelectric materials, biosensors etc. Read more…

Flextura PVD – Flexibility and prepared for the future
The Flextura platform is best described as Flexible Production | Flexible Processes | Flexible Investment. It is unveiling a new way of modular thinking for PVD systems. From a single chamber with evaporation or sputtering processes as a standalone system to an efficient cluster tool with multiple advanced processes. Read more…

Infinity – endless production, an in-line vertical sputtering platform
A vertical sputtering platform for single or dual side deposition on substrates or multi-substrate fixtures up to 650x3000mm. For substrates up to 650x650mm it is available with active substrate cooling, a high aspect ratio sputtering process combining HiPIMS and biasing for through hole metallisation and automatic multi-substrate loading magazine for increased throughput. Read more…

Roll-to-roll – turnkey deposition systems for polymer or metal foils
Turnkey solutions for your roll-to-roll process – small scale in-house proof-of-concept system available for a safe up-scaling. experience with a wide variety of substrates from metal and polymers to very flexible structured silicone webs. Read more…