News

Cassette-to-cassette evaporation and GLAD* processing

Polyteknik AS introduces an advanced ebeam evaporation module for the Flextura PVD platform. The specific module is developed for production scale glancing angle deposition (GLAD) and is the first commercially available fully automated GLAD tool for cassette-to-cassette processing of 200mm wafers. The base transfer and loading module is the standard Flextura platform – meaning a cleanroom interface for standard cassette loading. Behind the cleanroom wall the “magic” takes place… It is a single wafer process module including an electrostatic chuck…

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Meet us at SEMICON EUROPA 2019 – GET YOUR FREE VOUCHER HERE!

Getting ready for Europe’s strongest single event for electronics manufacturing industry. We are looking forward to welcoming you at our booth during SEMICON EUROPA 2019. Learn more about FLEXTURA PVD – probably the most flexible 200mm platform on the market! At the TECHLOUNGE we will share a recent case story based on the delivery of a FLEXTURA PVD cluster tool with an advanced in-system characterization module. A state-of-the-art configuration for design, growth and analysis of existing and new wide bandgap…

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FREE ACCESS VOUCHER FOR SEMICON EUROPA 2019

We are looking forward to welcoming you at our booth during SEMICON EUROPA 2019. Stop by for a refreshment and a discussion around your requirements for PVD systems and processes! See you there! Click on the banner below to receive your free 4 four day voucher!

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Glancing Angle Deposition on our Flextura PVD 200 Platform

Create nanostructured surfaces with new or improved properties. High surface area applications for use in various sensors and biosensors High surface area electrodes Manipulation of optical and mechanical properties Pilot or proof-of-concept on 100mm wafers available on one of our GLAD systems delivered to Aarhus University – Lets get in contact on your next GLAD challenge.

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Exhibitions 2019 – Join Us

Meet us at following exhibitions in 2019 Surface Plasmon Photonics (SPP9) , Copenhagen, Denmark ENRIS 2019, Enschede, The Netherlands MEMS & Sensor Summit 2019, Grenoble, France SEMICON EUROPA 2019, Münich, Germany 3D & Systems Summit 2020, Dresden, Germany

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FREE VOUCHER FOR SEMICON EUROPA 2018!

MEET US AT SEMICON EUROPA 2018 13-16th of November, MUNICH, Germany We are looking forward to talking to you about our Flextura PVD platform including high temperature epitaxial deposition platform, industrial scale glancing angle deposition and flexible high volume production for the 200mm industry!

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