Looking forward to presenting Polyteknik AS and our platforms Flextura PVD and Infinity VB.
You don’t have to wait – reach out already now and get latest info on some of our latest unique Flextura PVD Process Modules:
- M600 GLAD Module – Glancing angle deposition by ebeam evaporation in a fully automated CMOS compatible tool for processing of up to 200mm wafers from cassette
- M500 EPI Module – Epitaxial growth sputtering module
- Proven low stress & highly c-axis oriented AlN process
- A large parameter room for new materials with substrate temperatures up to 1000°C
- M700 LS Module – Superior sheet resistance uniformities for metal oxides & nitrides