Products

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Flextura PVD – Flexible Cluster tool for the semiconductor industry

Flextura PVD – Flexible Cluster tool for the semiconductor industry With the Flextura Cluster 200, Polyteknik AS is introducing a multifunctional deposition tool offering unseen flexibility combined with high troughput capacity. The system is born with standard SEMI wafer handling, high quality subcomponents and can be equipped with standard sputtering modules as well as newly developed modules introducing new development opportunities. The perfect tool for development or flexible production – directly up-scalable! High temperature deposition chamber Substrate temperatures up to 1000…

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Newsletter – December 2015

In this edition, you will find a short review of the interesting days we had at Semicon Europe 2015 presenting our latest PVD system, the Infinity VB, which offers many advantages because of the vertical sputtering set-up. You will also be introduced to the new product in our range of components. Developed and patented by Polyteknik AS, our superior magnetron sources have been designed to offer a target change in less than 2 minutes in combination with superior target cooling.Thus…

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